JPH0129296B2 - - Google Patents

Info

Publication number
JPH0129296B2
JPH0129296B2 JP58238097A JP23809783A JPH0129296B2 JP H0129296 B2 JPH0129296 B2 JP H0129296B2 JP 58238097 A JP58238097 A JP 58238097A JP 23809783 A JP23809783 A JP 23809783A JP H0129296 B2 JPH0129296 B2 JP H0129296B2
Authority
JP
Japan
Prior art keywords
plasma
plasma generation
generation chamber
target
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58238097A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60130039A (ja
Inventor
Kazutoshi Kusakabe
Kazuyuki Toki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP58238097A priority Critical patent/JPS60130039A/ja
Publication of JPS60130039A publication Critical patent/JPS60130039A/ja
Publication of JPH0129296B2 publication Critical patent/JPH0129296B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP58238097A 1983-12-16 1983-12-16 イオン源 Granted JPS60130039A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58238097A JPS60130039A (ja) 1983-12-16 1983-12-16 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58238097A JPS60130039A (ja) 1983-12-16 1983-12-16 イオン源

Publications (2)

Publication Number Publication Date
JPS60130039A JPS60130039A (ja) 1985-07-11
JPH0129296B2 true JPH0129296B2 (en]) 1989-06-09

Family

ID=17025122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58238097A Granted JPS60130039A (ja) 1983-12-16 1983-12-16 イオン源

Country Status (1)

Country Link
JP (1) JPS60130039A (en])

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2581244B1 (fr) * 1985-04-29 1987-07-10 Centre Nat Rech Scient Source d'ions du type triode a une seule chambre d'ionisation a excitation haute frequence et a confinement magnetique du type multipolaire
US4767931A (en) * 1986-12-17 1988-08-30 Hitachi, Ltd. Ion beam apparatus
JPH01132033A (ja) * 1987-11-17 1989-05-24 Hitachi Ltd イオン源及び薄膜形成装置
KR920003789B1 (ko) * 1988-02-08 1992-05-14 니뽄 덴신 덴와 가부시끼가이샤 플라즈마 스퍼터링을 이용한 박막 형성 장치 및 이온원
JPH03194833A (ja) * 1989-12-25 1991-08-26 Akira Oota イオンビーム照射装置
JPH04206425A (ja) * 1990-11-30 1992-07-28 Matsushita Electric Ind Co Ltd イオン源
JPH04206426A (ja) * 1990-11-30 1992-07-28 Matsushita Electric Ind Co Ltd イオン源

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
J VAC SCI TECHNOL=1982 *

Also Published As

Publication number Publication date
JPS60130039A (ja) 1985-07-11

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